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ASNA Semiconductor Grade Compounds (PERFREZ®) for Process & Applications
Wet Cleaning + ECD
ASNA perfluoroelastomer compounds for wet cleaning are highly engineered for static, dynamic, and bonded applications that require minimal metallic ion contamination.
Thermal Applications
ASNA perfluoroelastomer compounds are proven to have excellent thermal stability and maintain integrity at elevated temperatures often found in processes such as Oxidation, Diffusion, Annealing, and RTP.
 PRISM |  MX7-3d-2 |
|---|---|
 prism one kitprism one kit |  bonded gatesbonded gates |
 nw fittingsnw fittings |  PERFREZ® Semiconductor Grade PerfluroelastomerPERFREZ® Semiconductor Grade Perfluroelastomer |
 PERFREZ® Semiconductor Grade PerfluroelastomerPERFREZ® Semiconductor Grade Perfluroelastomer |  bonded gatesbonded gates |
Thin Film + Dry Etch
Thin Film, such as HDPCVD, PECVD, SACVD, PVD and ALD, along with Dry Etch and Ashing processes present harsh plasma and gas environments, often at elevated temperatures. Where traditional seals might break down in these conditions, ASNA next-generation perfluoroelastomer compounds have excellent chemical and thermal resistance and are virtually impervious to extreme fabrication processes.
LIFETIME
Designed for optimal lifetime
PERFORMANCE
Excellent performance in high temperature applications
RESISTANCE
Excellent plasma resistance
SEALING LOADS
Withstands higher sealing loads
OUTSTANDING
Outstanding physical properties
PURITY
Ultra-high purity semiconductor grade
High Performance Semiconductor O-ring Seals
ASNA has a great deal of experience manufacturing a full range of semiconductor grade standard O-ring sizes, AS-568A, JIS series, and Metric sizes. Our in-house tool makers have extensive experience fabricating high precision standard and custom molds to meet the most demanding semiconductor applications with a short response time.
ASNA’s highly integrated design and manufacturing processes are dedicated to provide our customers with standard products or custom made-to-order perfluoroelastomer (FFKM) o-ring and seal components to the highest performance and quality standards.
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